An all-silicon quantum computer architecture using <sup>29</sup>Si nuclear spins qubits buried in the spin-free matrix of <sup>28</sup>Si has been suggested. It requires an array of micro-magnets which impose a large magnetic field gradient along the chain of the <sup>29</sup>Si nuclear spins qubits, which allow for the NMR frequency difference between two neighboring <sup>29</sup>Si qubits. In this work, we report on the successful fabrication of an array of NiFe (Ni45%-Fe55%) micro-magnet stripes (the cross-section 1.2x1 μm<sup>2</sup>) formed directly on natural Si wafers using reactive ion etching (RIE) with the NH3-CO-Xe gas mixture. The magnetic field gradient calculation with the finite element method with the geometry of the fabricated NiFe stripes predicts the gradient of 0.4T/μm at the distance 100nm away from the micro-magnet when the stripes are placed in the static magnetic field of 6T for the NMR measurement. The magnetic property of fabricated NiFe stripes was also measured with SQUID, and confirmed that saturation magnetization hadn’t been deteriorated through RIE process.
Conference Committee Involvement (1)
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II