Kohei Okuda
at Osaka Univ
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | September 28, 2015
Proc. SPIE. 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V
KEYWORDS: Optical components, Photovoltaics, Mirrors, Lasers, Interferometers, Error analysis, Head, Extreme ultraviolet lithography, Synchrotron radiation, Laser optics

PROCEEDINGS ARTICLE | September 5, 2014
Proc. SPIE. 9206, Advances in Metrology for X-Ray and EUV Optics V
KEYWORDS: Actuators, Optical components, Mirrors, Optical amplifiers, Sensors, Error analysis, Control systems, Head, Motion measurement, Fizeau interferometers

PROCEEDINGS ARTICLE | October 15, 2013
Proc. SPIE. 8884, Optifab 2013
KEYWORDS: Optical components, Photovoltaics, Mirrors, X-rays, Head, Extreme ultraviolet, Extreme ultraviolet lithography, Synchrotron radiation, Algorithm development, Spherical lenses

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