Kohsuke Komorita
at Osaka Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | February 19, 2003
Proc. SPIE. 4830, Third International Symposium on Laser Precision Microfabrication
KEYWORDS: Fabrication, Oxides, Thin films, Metals, Photography, Oxygen, Laser irradiation, Pulsed laser operation, Tin, Oxidation

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