Dr. Koichi Imanaka
Senior General Manager at Micromachine Ctr
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 5 January 2006
Proc. SPIE. 6035, Microelectronics: Design, Technology, and Packaging II
KEYWORDS: Microelectromechanical systems, Single point diamond turning, Switches, Switching, Electrodes, Metals, Glasses, Silicon, Semiconducting wafers, RF communications

Proceedings Article | 22 December 1995
Proc. SPIE. 2595, Machine Tool, In-Line, and Robot Sensors and Controls
KEYWORDS: Optical amplifiers, Sensors, Scanners, Interfaces, CCD cameras, Head, Optical scanning, Algorithm development, CCD image sensors, Binary data

Proceedings Article | 12 May 1995
Proc. SPIE. 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping
KEYWORDS: Actuators, Oxides, Mirrors, Optical sensors, Resonators, Sensors, Scanners, Silicon, Diffusion, Optical scanning

Proceedings Article | 12 May 1995
Proc. SPIE. 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping
KEYWORDS: Actuators, Thin films, Light sources, Ferroelectric materials, Etching, Electrodes, Glasses, Silicon films, Thin film devices, Piezoelectric thin film actuators

Proceedings Article | 13 January 1993
Proc. SPIE. 1751, Miniature and Micro-Optics: Fabrication and System Applications II
KEYWORDS: Actuators, Photonic devices, Diffraction, Lithium, Light emitting diodes, Silicon, Semiconductor lasers, Collimation, Micro optics, Integrated optics

Showing 5 of 11 publications
Conference Committee Involvement (3)
MOEMS and Miniaturized Systems V
25 January 2005 | San Jose, California, United States
MOEMS and Miniaturized Systems IV
27 January 2004 | San Jose, California, United States
MOEMS and Miniaturized Systems III
27 January 2003 | San Jose, CA, United States
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