Dr. Koichi Miyauchi
General Manager at Central Glass International Inc
SPIE Involvement:
Publications (4)

Proceedings Article | 18 April 2017 Presentation + Paper
William Earley, Deanna Soucie, Kenji Hosoi, Arata Takahashi, Takashi Aoki, Brian Cardineau, Koichi Miyauchi, Jay Chun, Michael O'Sullivan, Robert Brainard
Proceedings Volume 10146, 101460H (2017) https://doi.org/10.1117/12.2258324
KEYWORDS: Photoresist materials, Extreme ultraviolet, Lithography, Extreme ultraviolet lithography, Polymers, Line width roughness, Solids, Polymerization, Sodium, Glasses

Proceedings Article | 20 March 2012 Paper
Kenji Hosoi, Brian Cardineau, William Earley, Seth Kruger, Koichi Miyauchi, Robert Brainard
Proceedings Volume 8325, 83251S (2012) https://doi.org/10.1117/12.917018
KEYWORDS: Polymers, Amplifiers, Line edge roughness, Extreme ultraviolet lithography, Extreme ultraviolet, Lithography, Diffusion, Glasses, Molecules, Neck

Proceedings Article | 20 March 2012 Paper
Proceedings Volume 8325, 832514 (2012) https://doi.org/10.1117/12.917015
KEYWORDS: Amplifiers, Fluorine, Line edge roughness, Extreme ultraviolet lithography, Lithography, Polymers, Photoresist materials, Polymerization, Temperature metrology, Extreme ultraviolet

Proceedings Article | 10 June 2004 Paper
Shigeo Kawata, Shuji Miyazaki, Qing Kong, Koichi Miyauchi, Jiri Limpouch, Alexander Andreev
Proceedings Volume 5482, (2004) https://doi.org/10.1117/12.558603
KEYWORDS: Radiation effects, Pulsed laser operation, Particles, High power lasers, Plasma, Magnetism, Light sources, Head, Laser scattering, Laser applications

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