Dr. Koichi Miyauchi
at Central Glass Co Ltd
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | April 18, 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Lithography, Polymers, Glasses, Photoresist materials, Solids, Polymerization, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Sodium

PROCEEDINGS ARTICLE | March 20, 2012
Proc. SPIE. 8325, Advances in Resist Materials and Processing Technology XXIX
KEYWORDS: Lithography, Polymers, Amplifiers, Photoresist materials, Polymerization, Extreme ultraviolet, Extreme ultraviolet lithography, Line edge roughness, Fluorine, Temperature metrology

PROCEEDINGS ARTICLE | March 20, 2012
Proc. SPIE. 8325, Advances in Resist Materials and Processing Technology XXIX
KEYWORDS: Neck, Lithography, Polymers, Glasses, Molecules, Diffusion, Amplifiers, Extreme ultraviolet, Extreme ultraviolet lithography, Line edge roughness

PROCEEDINGS ARTICLE | June 10, 2004
Proc. SPIE. 5482, Laser Optics 2003: Superintense Light Fields and Ultrafast Processes
KEYWORDS: Light sources, High power lasers, Particles, Laser applications, Laser scattering, Magnetism, Head, Radiation effects, Pulsed laser operation, Plasma

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