Dr. Koichi Miyauchi
at Central Glass Co Ltd
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 18 April 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Photoresist materials, Extreme ultraviolet, Lithography, Extreme ultraviolet lithography, Polymers, Line width roughness, Solids, Polymerization, Sodium, Glasses

Proceedings Article | 20 March 2012
Proc. SPIE. 8325, Advances in Resist Materials and Processing Technology XXIX
KEYWORDS: Amplifiers, Fluorine, Line edge roughness, Extreme ultraviolet lithography, Lithography, Polymers, Photoresist materials, Polymerization, Temperature metrology, Extreme ultraviolet

Proceedings Article | 20 March 2012
Proc. SPIE. 8325, Advances in Resist Materials and Processing Technology XXIX
KEYWORDS: Polymers, Amplifiers, Line edge roughness, Extreme ultraviolet lithography, Extreme ultraviolet, Lithography, Diffusion, Glasses, Molecules, Neck

Proceedings Article | 10 June 2004
Proc. SPIE. 5482, Laser Optics 2003: Superintense Light Fields and Ultrafast Processes
KEYWORDS: Radiation effects, Pulsed laser operation, Particles, High power lasers, Plasma, Magnetism, Light sources, Head, Laser scattering, Laser applications

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