Dr. Konstantin A. Okotrub
at Institute of Automation and Electrometry SB of RAS
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | October 25, 2018
Proc. SPIE. 10823, Nanophotonics and Micro/Nano Optics IV
KEYWORDS: Oxides, Vanadium, Thin films, Titanium, Metals, Laser processing, Chromium, Transition metals, Raman spectroscopy, Mask making, Molybdenum, Zirconium, Direct write lithography, Oxidation

PROCEEDINGS ARTICLE | February 17, 2017
Proc. SPIE. 10092, Laser-based Micro- and Nanoprocessing XI
KEYWORDS: Oxides, Thin films, Titanium, Femtosecond phenomena, Etching, Metals, Nickel, Laser processing, Laser development, Chromium, Laser ablation, Wet etching, Micromachining, Reactive ion etching

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