Dr. Konstantin V. Rudenko
at MV Lomonosov Moscow State Univ
SPIE Involvement:
Conference Chair | Editor | Author
Publications (23)

SPIE Conference Volume | January 26, 2017

PROCEEDINGS ARTICLE | December 30, 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Superposition, Fluctuations and noise, Sensors, Diagnostics, Tomography, Microelectronics, Reconstruction algorithms, Algorithm development, Atmospheric particles, Plasma

PROCEEDINGS ARTICLE | December 30, 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: FT-IR spectroscopy, Etching, Polymers, Dielectrics, Diffusion, Plasma etching, Fluorine, Bromine, Cryogenics, Plasma

PROCEEDINGS ARTICLE | December 30, 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Microelectromechanical systems, Electron beam lithography, Switches, Etching, Dry etching, Electrodes, Silicon, Control systems, Fluorine, Semiconducting wafers

PROCEEDINGS ARTICLE | December 30, 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Electron beam lithography, Etching, Silicon, Wet etching, Plasma etching, Reactive ion etching, Thermal oxidation, Plasma, Oxidation, Nanowires

PROCEEDINGS ARTICLE | December 30, 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Optical components, X-ray optics, Interferometers, Etching, Silicon, Atomic force microscopy, Plasma etching, Hard x-rays, Cryogenics, Plasma

Showing 5 of 23 publications
Conference Committee Involvement (1)
The International Conference on Micro- and Nano-Electronics 2016
3 October 2016 | Zvenigorod, Russian Federation
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