Dr. Kornelia Indykiewicz Profile

Dr. Kornelia Indykiewicz

PhD Eng. at Wroclaw Uniersity of Science and Technology

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Publications (2)

Proceedings Article | 29 August 2019 Paper

Chrome mask fabrication on Al2O3 substrate for new generation devices based on AlGaN/GaN heterostructure

Kornelia Indykiewicz, Bartłomiej Paszkiewicz, Agnieszka Zawadzka, Regina Paszkiewicz

Proceedings Volume 11177, 1117715 (2019) https://doi.org/10.1117/12.2535689

KEYWORDS: Photomasks, Mask making, Transducers, Lithography, Electron beam lithography, Absorption

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Proceedings Article | 25 July 2013 Paper

Analysis of e-beam impact on the resist stack in e-beam lithography process

K. Indykeiwicz, B. Paszkiewicz

Proceedings Volume 8902, 890210 (2013) https://doi.org/10.1117/12.2031703

KEYWORDS: Metals, Photoresist processing, Polymethylmethacrylate, Electron beam lithography, Monte Carlo methods, Scanning electron microscopy, Image processing, Device simulation, Analytical research, Gallium nitride

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