Flat panel displays (FPDs) such as liquid crystal or plasma displays require defect free and highly planer substrate panels in its manufacturing processes. Therefore, it is necessary to remove and analyze a killer dust particle on the panel surface in order to improve a problem and feedback to manufacturing process. However, nanometer-sized dust detection is difficult with an optical microscope and polarized light analysis method because of diffraction limit of light wave. Moreover, a detection method with an electron microscope has a problem, because a detection area is limited. This paper describes a large area detection of nanometer-sized dust on the surface of substrate using an evanescent wave illumination. Samples used in the experiment are polystyrene latex beads with diameter of 10μm, 1μm, and 200nm. A CCD camera observed a light scattering from polystyrene latex beads. The position of polystyrene latex bead could be specified from the scattering light image. This result shows that this method is effective for nanometer-sized dust detection in a large area.