Dr. Kostas Adam
Director of Engineering at Mentor, a Siemens Business
SPIE Involvement:
Author
Publications (51)

Proceedings Article | 20 March 2020 Presentation + Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Metrology, Data modeling, Databases, Metals, Scanners, Inspection, Computer simulations, Critical dimension metrology, Semiconducting wafers, Overlay metrology

Proceedings Article | 4 April 2019 Paper
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Coastal modeling, Cadmium, Data modeling, Calibration, Neural networks, Machine learning, Optical proximity correction, Systems modeling, Process modeling

Proceedings Article | 20 March 2019 Presentation + Paper
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Logic, Visualization, Error analysis, Manufacturing, Photomasks, Optical proximity correction, Critical dimension metrology, Failure analysis, Stochastic processes

Proceedings Article | 18 March 2019 Presentation
Proc. SPIE. 10961, Optical Microlithography XXXII
KEYWORDS: Lithography, Optical lithography, Computer simulations, 3D modeling, Photoresist materials, Finite element methods, Photoresist processing, Photoresist developing, Process modeling, Chemically amplified resists

Proceedings Article | 16 October 2017 Paper
Proc. SPIE. 10451, Photomask Technology 2017
KEYWORDS: Scanners, Error analysis, Manufacturing, Wavefronts, 3D modeling, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Optical proximity correction, Tolerancing

Showing 5 of 51 publications
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