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Kosuke Yamamoto
at Tokyo Electron Yamanashi Ltd.
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Publications (2)
Proceedings Article | 1 April 2016 Paper
Numerical placement analysis in hole multiplication patterns for directed self-assembly
K. Yamamoto, T. Nakano, M. Muramatsu, H. Genjima, T. Tomita, K. Matsuzaki, T. Kitano
Proceedings Volume 9777, 97771Q (2016) https://doi.org/10.1117/12.2218596
KEYWORDS: Directed self assembly, Lithography, Numerical analysis, Critical dimension metrology, Polymethylmethacrylate, Double patterning technology, Picosecond phenomena, Error analysis, Polymers, Computer simulations, Optical lithography
Proceedings Article | 19 March 2015 Paper
Computational analysis of hole placement errors for directed self-assembly
K. Yamamoto, T. Nakano, M. Muramatsu, T. Tomita, K. Matsuzaki, T. Kitano
Proceedings Volume 9423, 94231X (2015) https://doi.org/10.1117/12.2085084
KEYWORDS: Particles, Tolerancing, Polymethylmethacrylate, Critical dimension metrology, Error analysis, Data acquisition, Polymers, Computer simulations, Picosecond phenomena, Directed self assembly
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