Kouji Suzuki
at Tohoku Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 10, 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Silica, Glasses, Nondestructive evaluation, Ultrasonics, Wave propagation, Chemical analysis, Extreme ultraviolet lithography, Velocity measurements, Acoustics, Material characterization

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