Dr. Kouros Ghandehari
Process Engineer at
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 28 July 1997
Proc. SPIE. 3096, Photomask and X-Ray Mask Technology IV
KEYWORDS: Lithography, Reticles, Optical lithography, Data modeling, Deep ultraviolet, Printing, Photomasks, Optical proximity correction, Mask making, Optics manufacturing

Proceedings Article | 7 July 1997
Proc. SPIE. 3051, Optical Microlithography X
KEYWORDS: Logic, Deep ultraviolet, Etching, Dry etching, Photoresist processing

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