CONFERENCE PROCEEDINGS
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Krishnaparvathy Puthankovilakam
Doctoral Student at Ecole Polytechnique Federale de Lausanne
Publications (6)
PROCEEDINGS ARTICLE | February 27, 2017
Proc. SPIE. 10120, Complex Light and Optical Forces XI
KEYWORDS: Diffraction, Modulation, Polarization, Interferometry, Electromagnetic radiation, Computer simulations, Near field, Distance measurement, Near field diffraction, Objectives, Singular optics, Electromagnetism, Nanofabrication, Radio propagation, Diffraction gratings
PROCEEDINGS ARTICLE | March 15, 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Diffraction, Phase shifting, Visualization, Microscopy, Image resolution, Phase shift keying, Printing, Optical proximity correction, Phase measurement, Binary data
PROCEEDINGS ARTICLE | March 4, 2016
Proc. SPIE. 9764, Complex Light and Optical Forces X
KEYWORDS: Lithography, Diffraction, Modulation, Phase shift keying, Printing, Photomasks, Phase measurement, Geometrical optics, Neodymium, Stray light
SPIE Journal Paper | January 29, 2016
JM3 Vol. 15 Issue 02
KEYWORDS: Phase shifts, Photomasks, Printing, Phase measurement, Microscopy, Diffraction, Quartz, Semiconducting wafers, Resolution enhancement technologies
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PROCEEDINGS ARTICLE | March 18, 2015
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Diffraction, Phase shifting, Quartz, Microscopy, Printing, Photomasks, Optical proximity correction, Phase measurement, Tolerancing, Phase shifts
PROCEEDINGS ARTICLE | August 18, 2014
Proc. SPIE. 9203, Interferometry XVII: Techniques and Analysis
KEYWORDS: Lithography, Microscopes, Beam splitters, Lithographic illumination, Printing, Objectives, Photomasks, Optical proximity correction, Structural design, Resolution enhancement technologies
Showing 5 of 6 publications
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