Mr. Krzysztof R. Gajewski
at Wroclaw Univ of Technology
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | July 25, 2013
Proc. SPIE. 8902, Electron Technology Conference 2013
KEYWORDS: Lithography, Nanostructures, Silica, Graphene, Silicon, Chemical vapor deposition, Photoresist materials, Photomasks, Microfabrication, Computer aided design

PROCEEDINGS ARTICLE | July 25, 2013
Proc. SPIE. 8902, Electron Technology Conference 2013
KEYWORDS: Carbon, Refractive index, Atmospheric plasma, Hydrogen, Atomic force microscopy, Raman spectroscopy, Spectroscopic ellipsometry, Plasma enhanced chemical vapor deposition, Deposition processes, Plasma

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top