Prof. Kuen-Yu Tsai
Associate Professor at National Taiwan Univ
SPIE Involvement:
Area of Expertise:
Nanolithography processes, equipment, and software , Design for manufacturability and variability of nanometer IC , Nanoscale detection and servo systems , Multiobjective robust optimal control , System identification , Convex optimization and its engineering applications
Publications (38)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12954, 129540C (2024)
KEYWORDS: Transistors, Lithography, Optical proximity correction, Semiconducting wafers, Device simulation, Design rules, Field effect transistors, Extreme ultraviolet lithography

Proceedings Article | 30 April 2023 Presentation
Proceedings Volume 12495, 1249512 (2023)
KEYWORDS: Transistors, Standards development

SPIE Journal Paper | 29 July 2021
JM3, Vol. 20, Issue 03, 033201, (July 2021)
KEYWORDS: Point spread functions, Helium, Ion beam lithography, Process modeling, Optical lithography, Modulation, Scattering, Laser scattering, Electron beam lithography, Photoresist processing

SPIE Journal Paper | 10 July 2021
JM3, Vol. 20, Issue 03, 033401, (July 2021)
KEYWORDS: TCAD, Transistors, Device simulation, 3D modeling, Integrated circuits, Instrument modeling, Lithography, Error analysis, Logic, Doping

SPIE Journal Paper | 27 April 2021
Chien-Lin Lee, Jia-Syun Cai, Sheng-Wei Chien, Kuen-Yu Tsai, Jia-Han Li, Chao-Te Lee
JM3, Vol. 20, Issue 02, 023001, (April 2021)
KEYWORDS: Optical lithography, Palladium, Helium, Ion beams, Direct write lithography, Metrology, Extreme ultraviolet lithography, Lithography, Silicon, Glasses

Showing 5 of 38 publications
Conference Committee Involvement (3)
SPIE Lithography Asia - Korea
13 October 2010 | n/a, Republic of Korea
SPIE Lithography Asia - Taiwan
18 November 2009 | Taipei, Taiwan
SPIE Lithography Asia - Taiwan
4 November 2008 | Taipei, Taiwan
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