Prof. Kuen-Yu Tsai
Associate Professor at National Taiwan Univ
SPIE Involvement:
Area of Expertise:
Nanolithography processes, equipment, and software , Design for manufacturability and variability of nanometer IC , Nanoscale detection and servo systems , Multiobjective robust optimal control , System identification , Convex optimization and its engineering applications
Publications (33)

Proceedings Article | 1 October 2019 Paper
Proc. SPIE. 11147, International Conference on Extreme Ultraviolet Lithography 2019
KEYWORDS: Lithography, Metrology, Optical lithography, Extreme ultraviolet lithography, Helium, Ion beam lithography

Proceedings Article | 20 March 2019 Presentation + Paper
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Transistors, Extreme ultraviolet lithography, TCAD, Device simulation

Proceedings Article | 20 March 2019 Presentation + Paper
Proc. SPIE. 10961, Optical Microlithography XXXII
KEYWORDS: Lithography, Photomasks, Machine learning, Computational lithography, Optical proximity correction

Proceedings Article | 19 March 2018 Paper
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Point spread functions, Modulation, Scattering, Helium, Ion beam lithography, Model-based design, Process modeling

Proceedings Article | 28 March 2017 Presentation + Paper
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Lithography, Electron beam lithography, Metrology, Optical lithography, Inspection, Ion beams, Bridges, Helium, Critical dimension metrology, Photoresist processing

Showing 5 of 33 publications
Conference Committee Involvement (3)
SPIE Lithography Asia - Korea
13 October 2010 | n/a, Republic of Korea
SPIE Lithography Asia - Taiwan
18 November 2009 | Taipei, Taiwan
SPIE Lithography Asia - Taiwan
4 November 2008 | Taipei, Taiwan
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