Mr. Kujan Gorhad
at Carl Zeiss SMS Ltd
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 8, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Actuators, Lithography, Reticles, Metrology, Lithium, Image processing, Scanners, Image registration, Process control, Photomasks, Chemical elements, Semiconducting wafers, Yield improvement, Overlay metrology

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Actuators, Reticles, Metrology, Lithium, Scanners, Distortion, Image registration, Photomasks, Semiconducting wafers, Overlay metrology

PROCEEDINGS ARTICLE | October 29, 2014
Proc. SPIE. 9235, Photomask Technology 2014
KEYWORDS: Metrology, Quartz, Image processing, Scanners, Image registration, Pellicles, Data acquisition, Photomasks, Semiconducting wafers, Overlay metrology

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