Dr. Kumi Motai
at Hitachi Ltd
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 22, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Oxides, Mirrors, Hydrogen, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Ruthenium, Plasma, Protactinium, Oxidation

PROCEEDINGS ARTICLE | March 23, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Etching, Sputter deposition, Ions, Manufacturing, Atomic force microscopy, Transmission electron microscopy, Ion beams, Photomasks, Extreme ultraviolet lithography, Deposition processes

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