Dr. Kumud M. Srinivasan
Director at Intel Corp
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 29, 2004
Proc. SPIE. 5378, Data Analysis and Modeling for Process Control
KEYWORDS: Nanotechnology, Optical lithography, Statistical analysis, Data modeling, Error analysis, Control systems, Process control, Semiconducting wafers, Standards development, Data analysis

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