Kunal N. Taravade
CAE Manager OPC at Synopsys Inc
SPIE Involvement:
Conference Program Committee | Author
Publications (11)

PROCEEDINGS ARTICLE | October 14, 2011
Proc. SPIE. 8166, Photomask Technology 2011
KEYWORDS: Wafer-level optics, Lithography, Data modeling, Computer simulations, 3D modeling, Photomasks, Source mask optimization, Optical proximity correction, Semiconducting wafers, Tolerancing

PROCEEDINGS ARTICLE | September 25, 2010
Proc. SPIE. 7823, Photomask Technology 2010
KEYWORDS: Lithography, Image processing, Manufacturing, Electroluminescence, Photomasks, Cadmium sulfide, Source mask optimization, Optical proximity correction, Optimization (mathematics), Semiconducting wafers

PROCEEDINGS ARTICLE | May 29, 2007
Proc. SPIE. 6607, Photomask and Next-Generation Lithography Mask Technology XIV
KEYWORDS: Spatial light modulators, Image quality, Photomasks, Optical proximity correction, Convolution, Modulation transfer functions, Critical dimension metrology, Stray light, Semiconducting wafers, Stereolithography

PROCEEDINGS ARTICLE | May 15, 2007
Proc. SPIE. 6607, Photomask and Next-Generation Lithography Mask Technology XIV
KEYWORDS: Lithography, Atrial fibrillation, Image segmentation, Computer simulations, Optical proximity correction, Semiconducting wafers, Tolerancing, Performance modeling, Model-based design, Resolution enhancement technologies

PROCEEDINGS ARTICLE | May 28, 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Lithography, Reticles, Data modeling, Calibration, Image processing, Scanning electron microscopy, Optical proximity correction, Critical dimension metrology, Semiconducting wafers, Process modeling

PROCEEDINGS ARTICLE | May 28, 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Lithography, Reticles, Lithographic illumination, Manufacturing, Scanning electron microscopy, Printing, Photomasks, Data conversion, Semiconducting wafers, Phase shifts

Showing 5 of 11 publications
Conference Committee Involvement (1)
Optical Microlithography XXXII
26 February 2019 | San Jose, California, United States
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top