Kuninori Nishizawa
at Hitachi High-Tech Science Corp
SPIE Involvement:
Publications (11)

Proceedings Article | 28 June 2013 Paper
Kokoro Kato, Yoshiyuki Taniguchi, Kuninori Nishizawa
Proceedings Volume 8701, 87010C (2013) https://doi.org/10.1117/12.2027851
KEYWORDS: Photomasks, Tolerancing, Optical proximity correction, Fuzzy logic, Data processing, Mirrors, Semiconducting wafers, Electronic design automation, Critical dimension metrology, Nanotechnology

Proceedings Article | 19 May 2008 Paper
Kokoro Kato, Yoshiyuki Taniguchi, Masakazu Endo, Kuninori Nishizawa, Tadao Inoue, Toshiaki Fujii
Proceedings Volume 7028, 702834 (2008) https://doi.org/10.1117/12.793111
KEYWORDS: Photomasks, Data conversion, Optical proximity correction, Parallel processing, Nanotechnology, Data modeling, Standards development, Data processing, Error analysis, Explosives

Proceedings Article | 1 November 2007 Paper
Proceedings Volume 6730, 67304F (2007) https://doi.org/10.1117/12.746549
KEYWORDS: Photomasks, Manufacturing, Inspection, Design for manufacturing, Data conversion, Software development, SRAF, Design for manufacturability, Optical proximity correction, Error analysis

Proceedings Article | 15 May 2007 Paper
Proceedings Volume 6607, 66072P (2007) https://doi.org/10.1117/12.729008
KEYWORDS: Data conversion, Photomasks, Data analysis, Error analysis, Standards development, Electronic design automation, Nanotechnology, Data processing, Data compression

Proceedings Article | 20 May 2006 Paper
Proceedings Volume 6283, 62832P (2006) https://doi.org/10.1117/12.681802
KEYWORDS: Data conversion, Data processing, Photomasks, Nanotechnology, Electronic design automation, Software development, Standards development, Optical proximity correction, Data compression, Vestigial sideband modulation

Showing 5 of 11 publications
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