Dr. Kuniyuki Kakushima
at Tokyo Institute of Technology
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | December 6, 2005
Proc. SPIE. 6050, Optomechatronic Micro/Nano Devices and Components
KEYWORDS: Actuators, Electronics, Particles, Molecules, Silicon, Electron microscopes, Scanning electron microscopy, Palladium, Scanning transmission electron microscopy, Molecular electronics

PROCEEDINGS ARTICLE | October 25, 2004
Proc. SPIE. 5604, Optomechatronic Micro/Nano Components, Devices, and Systems
KEYWORDS: Etching, Dry etching, Electrodes, Molecules, Silicon, Photography, Scanning electron microscopy, Wet etching, Fluorine, Molecular electronics

PROCEEDINGS ARTICLE | September 20, 2004
Proc. SPIE. 5448, High-Power Laser Ablation V
KEYWORDS: Laser energy, Annealing, Silicon, Laser processing, Laser applications, Doping, Semiconductor lasers, Bridges, Photomasks, Boron

PROCEEDINGS ARTICLE | August 16, 2004
Proc. SPIE. 5455, MEMS, MOEMS, and Micromachining
KEYWORDS: Microelectromechanical systems, Nanotechnology, Microscopes, Molecules, Silicon, Transmission electron microscopy, Silicon films, Reactive ion etching, Anisotropic etching, Nanolithography

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