Kurt Gielissen
at Technische Univ Eindhoven
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 18, 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Optical filters, Silicon, Reflectivity, Carbon dioxide lasers, Infrared spectroscopy, Transmittance, Infrared radiation, Extreme ultraviolet, Extreme ultraviolet lithography, Plasma

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