Dr. Kwame Owusu-Boahen
at Samsung Austin Semiconductor LLC
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 25 May 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Semiconductors, Image processing, Scanning electron microscopy, Signal processing, Transistors, Semiconducting wafers, Color imaging, Defect inspection

Proceedings Article | 16 July 2002
Proc. SPIE. 4689, Metrology, Inspection, and Process Control for Microlithography XVI
KEYWORDS: Carbon, Electron beams, Defect detection, Metals, Reliability, Resistance, Inspection, Scanning electron microscopy, Transistors, Semiconducting wafers

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