Dr. Kwame Owusu-Boahen
at SAMSUNG Austin Semiconductor LLC
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 22 February 2021 Paper
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
KEYWORDS: Defect detection, Inspection, Image analysis, Transmission electron microscopy, Optical inspection, Semiconductor manufacturing, Failure analysis

Proceedings Article | 20 March 2020 Presentation + Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Semiconductors, Lithography, Defect detection, Manufacturing, Inspection, Transmission electron microscopy, Semiconductor manufacturing, Semiconducting wafers, Wafer testing, Overlay metrology

Proceedings Article | 25 May 2017 Presentation
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Semiconductors, Image processing, Scanning electron microscopy, Signal processing, Transistors, Semiconducting wafers, Color imaging, Defect inspection

Proceedings Article | 16 July 2002 Paper
Proc. SPIE. 4689, Metrology, Inspection, and Process Control for Microlithography XVI
KEYWORDS: Carbon, Electron beams, Defect detection, Metals, Reliability, Resistance, Inspection, Scanning electron microscopy, Transistors, Semiconducting wafers

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