Dr. Kwang-sun Yoon
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 29 March 2013 Paper
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Lithography, Optical lithography, Image processing, Scanning electron microscopy, Photomasks, Ion implantation, Logic devices, Nanoimprint lithography, Photoresist processing, Chemically amplified resists

Proceedings Article | 16 April 2011 Paper
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Etching, Particles, Dielectrics, Silicon, Coating, Reflectivity, Plasma etching, Semiconducting wafers, System on a chip, Plasma

Proceedings Article | 16 April 2011 Paper
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Oxides, Electron beam lithography, Etching, Ions, Silicon, Gases, Hydrogen, Plasma etching, Reactive ion etching, Plasma

Proceedings Article | 4 March 2010 Paper
Proc. SPIE. 7640, Optical Microlithography XXIII
KEYWORDS: Lithography, Optical lithography, Data modeling, Opacity, Glasses, 3D modeling, Finite element methods, Photomasks, SRAF, Binary data

Proceedings Article | 1 April 2009 Paper
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Lithography, Electronics, Optical lithography, Image compression, Polymers, Diffusion, Electroluminescence, Photoresist materials, Resolution enhancement technologies, Temperature metrology

Showing 5 of 11 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top