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Kwen Woo Han
at SAMSUNG SDI Co Ltd
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Publications (2)
Proceedings Article | 27 March 2014 Paper
Decreasing curing temperature of spin-on dielectrics by using additives
Jin Hee Bae, Kwen Woo Han, Eun Su Park, Hui Chan Yoon, Yoong Hee Na, Jin Woo Seo, Wan Hee Lim, Bo Sun Kim, Jun Young Jang, Younjin Cho
Proceedings Volume 9051, 90511R (2014) https://doi.org/10.1117/12.2046098
KEYWORDS: Dielectrics, Silicon, Silica, Oxides, Semiconductors, Etching, Resistance, Manufacturing, Polymers, Plasma
Proceedings Article | 20 March 2012 Paper
Tunable resin reactivity of spin-on dielectric by controlling synthesis process
Kwen Woo Han, Hyun-Ji Song, Mi-Young Kim, Eun Su Park, Hui Chan Yoon, Go Eun Kim, Sang Hak Lim, Sang Kyun Kim
Proceedings Volume 8325, 83252B (2012) https://doi.org/10.1117/12.916252
KEYWORDS: Dielectrics, Silica, Semiconductors, Semiconducting wafers, Process control, Chemical vapor deposition, Polymers, Wet etching, Etching, Plasma
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