Mr. KweonJae Lee
Principal Engineer
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | March 16, 2016
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Metrology, Defect detection, Image processing, Error analysis, Manufacturing, Inspection, Quantitative analysis, Solids, Design for manufacturing, Double patterning technology, Critical dimension metrology, Semiconducting wafers, Design for manufacturability

PROCEEDINGS ARTICLE | October 23, 2015
Proc. SPIE. 9635, Photomask Technology 2015
KEYWORDS: Reticles, Optical lithography, Manufacturing, Quality measurement, Bridges, Photomasks, Optical proximity correction, Critical dimension metrology, Semiconducting wafers, Product engineering

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Reticles, Optical lithography, Sensors, Etching, Composites, Inspection, Scanning electron microscopy, Double patterning technology, Line edge roughness, Semiconducting wafers

PROCEEDINGS ARTICLE | March 18, 2015
Proc. SPIE. 9427, Design-Process-Technology Co-optimization for Manufacturability IX
KEYWORDS: Lithography, Metrology, Optical lithography, Error analysis, Composites, Inspection, Bridges, Semiconducting wafers, Overlay metrology, Defect inspection

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top