Dr. Kyle Braam
Engineer & Design at Synopsys Inc
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 22 March 2021 Presentation + Paper
Proc. SPIE. 11613, Optical Microlithography XXXIV
KEYWORDS: Visualization, Neural networks, Machine learning, Optical proximity correction

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11327, Optical Microlithography XXXIII
KEYWORDS: Lithography, Data modeling, Calibration, Inverse problems, Photomasks, Machine learning, Optical proximity correction, Convolution, Network architectures

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV
KEYWORDS: Lithography, Bridges, Photomasks, Optical proximity correction, SRAF, Semiconducting wafers, Resolution enhancement technologies, Data analysis

Proceedings Article | 5 April 2019 Presentation + Paper
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Optical lithography, Manufacturing, 3D modeling, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Electromagnetism, Stochastic processes, EUV optics

Proceedings Article | 20 March 2018 Paper
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Lithography, Optical lithography, Calibration, Manufacturing, Computer simulations, 3D modeling, Photomasks, Source mask optimization, Optical proximity correction, Photoresist processing

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