Mr. Kyoil Koo
Flash memory OPC Team leader at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | September 9, 2013
Proc. SPIE. 8880, Photomask Technology 2013
KEYWORDS: Metrology, Data modeling, Calibration, Atomic force microscopy, Scanning electron microscopy, Optical proximity correction, Critical dimension metrology, Data conversion, Optical calibration, Instrument modeling

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