Dr. Kyoko Kojima
Senior Researcher at Hitachi Ltd
SPIE Involvement:
Author
Area of Expertise:
Organic Chemistry , photosensitive materials , biochemistry , organic electric materials
Publications (6)

Proceedings Article | 12 April 2007 Paper
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Lithography, Optical lithography, Silicon, Inspection, Scanning electron microscopy, Silicon films, Extreme ultraviolet, Extreme ultraviolet lithography, Analytical research, Line edge roughness

Proceedings Article | 22 March 2007 Paper
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Semiconductors, Lithography, Polymers, Molecules, Inspection, Extreme ultraviolet, Extreme ultraviolet lithography, Line edge roughness, Molybdenum, Chromatography

Proceedings Article | 29 March 2006 Paper
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Lithography, Potassium, FT-IR spectroscopy, Etching, Polymers, Silicon, Inspection, Scanning electron microscopy, Extreme ultraviolet lithography, Line edge roughness

Proceedings Article | 29 March 2006 Paper
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Lithography, FT-IR spectroscopy, Etching, Argon, Glasses, Silicon, Silicon films, Absorbance, Line edge roughness, Semiconducting wafers

Proceedings Article | 16 September 2003 Paper
Proc. SPIE. 5069, Optical Data Storage 2003
KEYWORDS: Electrodes, Polymers, Photography, Reflectivity, Transmittance, Digital video discs, Optical storage, Polarons, Optical discs, Absorption

Showing 5 of 6 publications
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