Ms. Kyoko Matsuoka Profile

Kyoko Matsuoka

at Joining and Welding Research Institute Osaka Univ

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Publications (3)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Analysis of dissolution kinetics of poly(4-hydroxystyrene) with different molecular weight distributions in alkaline aqueous solution using machine learning

Naoki Tanaka, Kyoko Watanabe, Kyoko Matsuoka, Kazuki Azumagawa, Takahiro Kozawa, Takuya Ikeda, Yoshitaka Komuro, Daisuke Kawana

Proceedings Volume 11612, 116120R (2021) https://doi.org/10.1117/12.2584067

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Proceedings Article | 20 September 2020 Presentation

Study on dependence of transient swelling layer formation on molecular weight and dispersion of backbone polymer of chemically amplified EUV resists

Takahiro Kozawa, Kyoko Watanabe, Kyoko Matsuoka, Naoki Tanaka, Kazuki Azumagawa, Takuya Ikeda, Yoshitaka Komuro, Daisuke Kawana

Proceedings Volume 11517, 115170G (2020) https://doi.org/10.1117/12.2574877

KEYWORDS: Polymers, Stochastic processes, Dispersion, Extreme ultraviolet, Line edge roughness, Molecules, Photons, Bridges, Chemical reactions, Diffusion

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Proceedings Article | 31 May 2019 Paper

Fundamental study on dissolution kinetics of poly(4-hydroxystyrene) for development of high-resolution resists

Ayako Nakajima, Kyoko Watanabe, Kyoko Matsuoka, Takahiro Kozawa, Yoshitaka Komuro, Daisuke Kawana, Akiyoshi Yamazaki

Proceedings Volume 10957, 109571R (2019) https://doi.org/10.1117/12.2514938

KEYWORDS: Polymers, Molecules, Quartz, Crystals, Polymer thin films, Extreme ultraviolet lithography, Diffusion, Complex systems, Chemically amplified resists, Lithography

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