Mr. Kyong-Mun Shin Profile

Kyong-Mun Shin

Assistant Manager at PKL Co Ltd

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Publications (2)

Proceedings Article | 20 August 2004 Paper

The judgment criteria of halftone pinhole defects

Kyong Mun Shin, Dae-Woo Kim, Jung-Kwan Lee, Dong-Hyuk Lee, Jin-Min Kim, Sang-Soo Choi

Proceedings Volume 5446, (2004) https://doi.org/10.1117/12.557728

KEYWORDS: Halftones, Transmittance, Inspection, Photomasks, Semiconducting wafers, Ion beams, Defect inspection, Inspection equipment, Image transmission, Defect detection

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Proceedings Article | 28 August 2003 Paper

Detection capability for chrome defect of tri-tone PSM

Jung-Kwan Lee, Dae-Woo Kim, Kyong-Mun Shin, Dong-Heok Lee, Jin-Min Kim, Sang-Soo Choi

Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504205

KEYWORDS: Inspection, Photomasks, Chromium, Semiconducting wafers, Phase shifts, Transmittance, Light sources, Quartz, Defect inspection, Semiconductors

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