Dr. Kyoung-Seon Kim
at KAIST
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | March 29, 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Lithography, FT-IR spectroscopy, Deep ultraviolet, Etching, Polymers, Lamps, Printing, Polymerization, Photoresist processing, Absorption

PROCEEDINGS ARTICLE | May 4, 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Lithography, Polymers, Ultraviolet radiation, Silicon, Solids, Absorbance, Sodium, Photomicroscopy, Semiconducting wafers, Standards development

PROCEEDINGS ARTICLE | May 4, 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Lithography, FT-IR spectroscopy, Deep ultraviolet, Polymers, Ultraviolet radiation, Lamps, Photoresist materials, Absorbance, Semiconducting wafers, Absorption

PROCEEDINGS ARTICLE | June 12, 2003
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Lithography, FT-IR spectroscopy, Deep ultraviolet, Polymers, Ultraviolet radiation, Photoresist materials, Polymerization, Absorbance, Sodium, Semiconducting wafers

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