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Liang Liu
at Xi'an Technological Univ
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Publications (1)
Proceedings Article | 16 December 2013 Paper
Study on the fabrication and releasing of sacrificial layer of micro-cantilever
Liang Liu, Weiguo Liu, Huan Liu
Proceedings Volume 9068, 90680V (2013) https://doi.org/10.1117/12.2054012
KEYWORDS: Image processing, Reflection, Oxygen, Infrared detectors, Dry etching, Staring arrays, Absorption, Etching, Infrared imaging, Photomasks
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