Lingyi Guo
Senior Associate Engineer at Semiconductor Manufacturing International Corp
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Metrology, Etching, Image processing, Scanning electron microscopy, Transmission electron microscopy, Software development, Cadmium sulfide, Semiconductor manufacturing, Critical dimension metrology

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