Dr. Lucia D'Urzo
at Pall BVBA
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11612, Advances in Patterning Materials and Processes XXXVIII
KEYWORDS: Lithography, Metals, Particles, Molecules, Coating, Linear filtering, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Liquids

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Lithography, Particles, Ions, Silicon, Scanning electron microscopy, Aluminum, Plasma etching, Semiconducting wafers

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Particles, Inspection, Bridges, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Defect inspection

Proceedings Article | 7 April 2017 Presentation + Paper
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Optical lithography, Etching, Photoresist materials, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, High volume manufacturing, Photoresist processing, Semiconducting wafers, Photoresist developing, Resolution enhancement technologies

Proceedings Article | 27 March 2017 Paper
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Lithography, Particles, Scanning electron microscopy, Photoresist materials, Frequency modulation, Finite element methods, Bridges, Line width roughness, Fermium, Immersion lithography, Line edge roughness, Semiconducting wafers

Showing 5 of 11 publications
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