Dr. Lucia D'Urzo
at Pall BVBA
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 7 April 2017
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Optical lithography, Etching, Photoresist materials, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, High volume manufacturing, Photoresist processing, Semiconducting wafers, Photoresist developing, Resolution enhancement technologies

Proceedings Article | 27 March 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Lithography, Particles, Scanning electron microscopy, Photoresist materials, Frequency modulation, Finite element methods, Bridges, Line width roughness, Fermium, Immersion lithography, Line edge roughness, Semiconducting wafers

Proceedings Article | 22 March 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Lithography, Metrology, Optical lithography, Etching, Polymers, Silicon, Manufacturing, Scanning electron microscopy, Bridges, Directed self assembly, Epitaxy, Thin film coatings, Semiconducting wafers

SPIE Journal Paper | 2 July 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Etching, Scanning electron microscopy, Silicon, Inspection, Semiconducting wafers, Diffractive optical elements, Defect inspection, Thin film coatings, Directed self assembly

Proceedings Article | 20 March 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Lithography, Molecular bridges, Metals, Particles, Scanning electron microscopy, Bridges, Extreme ultraviolet, Extreme ultraviolet lithography, Immersion lithography, Semiconducting wafers

Showing 5 of 8 publications
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