Lamia Nouri
at Commissariat à l'Énergie Atomique
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 27 April 2017
Proc. SPIE. 10144, Emerging Patterning Technologies
KEYWORDS: Lithography, Electron beam lithography, FT-IR spectroscopy, Ions, Silicon, Microelectronics, Ion implantation, Integrated circuits, Wet etching, Ion beam lithography

Proceedings Article | 10 April 2017
Proc. SPIE. 10149, Advanced Etch Technology for Nanopatterning VI
KEYWORDS: Lithography, Electron beam lithography, Etching, Line width roughness, Directed self assembly, Nanoimprint lithography, Critical dimension metrology, Photoresist processing, Semiconducting wafers, System on a chip

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