In this paper, we experimentally demonstrated a new technique of electric-field assisted assembly of core-shell particles to create uniform contact hole array with complex geometries. A spatially varying dielectrophoretic (DEP) force created by lithographically defined guiding features is used to control the particle position. The influence of the predefined guiding features on contact hole pattern displacement is systematically studied. The results show that the center-to-center spacing rather than the size and shape of the guiding features determines the particle placement, which indicates the self-healing potential of this technique.
In this paper, we investigate an electric-field assisted assembly approach to create dense arrays of contact hole patterns with complex feature geometries. This hybrid strategy uses a spatially varying dielectrophoretic (DEP) force created by lithographically defined guiding features to assemble dense arrays of nanoparticles within the features, thereby replicating features within the starting pattern. For close-packed particle arrays, the half- and full-pitch of the contact hole array is defined by the starting nanoparticle core and shell diameter.
In this paper, we demonstrate an ultra-thin, low-loss optical metamaterial filter with high transmission and near constant
group delay across a broad pass-band from 3.0 to 3.5μ m. Deep-subwavelength air hole inclusions positioned at the corners
of a conventional metallodiectric fishnet were used engineer the dispersive properties of the structure to have an impedance
match to free space over the pass-band. The optical properties of the metamaterial filter were verified by experimentally
fabricating and characterizing the optimized free-standing nano-notched fishnet. The measured experimental results agreed
well with the simulated response, showing a high transmission band over the targeted wavelength band.
We demonstrate a flexible thin film zero refractive index optical metamaterial with matched impedance to free space and
low absorption loss at 1.55 μm. The metallo-dielectric multilayer structure with fishnet geometry was optimized by a
genetic algorithm. The fabrication process and characterization approach are described. The experiment results agree
well with the theoretical predictions, showing an effective index of neff = 0.072 + 0.51i and an impedance of Zeff/Z0 = 1.009 – 0.021i.