Ms. Lan Lin
at
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | March 22, 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Lithography, Electron beam lithography, Optical lithography, Curium, Nanoparticles, Etching, Electrodes, Particles, Dielectrophoresis, Nanoimprint lithography, Critical dimension metrology, Neodymium, Nanolithography

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Semiconductors, Lithography, Electron beam lithography, Optical lithography, Curium, Nanoparticles, Particles, Dielectrophoresis, Latex, Nanolithography

PROCEEDINGS ARTICLE | March 7, 2014
Proc. SPIE. 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII
KEYWORDS: Gold, Metamaterials, Optical filters, Refractive index, Silica, Optical properties, Dispersion, Free space, Reactive ion etching, Optical metamaterials

PROCEEDINGS ARTICLE | October 15, 2012
Proc. SPIE. 8455, Metamaterials: Fundamentals and Applications V
KEYWORDS: Gold, Metamaterials, Refractive index, Genetic algorithms, Optical properties, Magnetism, Free space, Reactive ion etching, Optical metamaterials, Absorption

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