Dr. Lan Wang
at Nanyang Technological Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 14, 2004
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Lithography, Manufacturing, Computer simulations, 3D modeling, Solids, Critical dimension metrology, Semiconducting wafers, Prototyping, Process modeling, Temperature metrology

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