Dr. Laren M. Tolbert
Professor at Georgia Institute of Technology
SPIE Involvement:
Author
Publications (32)

Proceedings Article | 20 March 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Polymers, Glasses, Molecules, Silicon, Scanning electron microscopy, Polymerization, Line edge roughness, Semiconducting wafers, Photoresist developing, Standards development

Proceedings Article | 20 March 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Lithography, Light sources, Optical lithography, Polymers, Glasses, Diffusion, Scanning electron microscopy, Polymerization, Extreme ultraviolet, Extreme ultraviolet lithography

Proceedings Article | 20 March 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Oxides, Switches, Optical lithography, Polymers, Glasses, Molecules, Silicon, Polymerization, Extreme ultraviolet, Standards development

Proceedings Article | 27 March 2014
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Switches, Optical lithography, Deep ultraviolet, Polymers, Glasses, Molecules, Photoresist materials, Polymerization, Extreme ultraviolet, Extreme ultraviolet lithography

Proceedings Article | 27 March 2014
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Optical lithography, Deep ultraviolet, Polymers, Glasses, Molecules, Diffusion, Control systems, Polymerization, Extreme ultraviolet, Line edge roughness

Showing 5 of 32 publications
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