Dr. Larry F. Rhodes
Research Fellow at Promerus LLC
SPIE Involvement:
Publications (12)

Proceedings Article | 4 May 2005 Paper
Larry Rhodes, Chun Chang, Cheryl Burns, Dennis Barnes, Brian Bennett, Larry Seger, Xiaoming Wu, Andy Sobek, Mike Mishak, Craig Peterson, Leah Langsdorf, Hideo Hada, Hiroaki Shimizu, Kazuhito Sasaki
Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.600051
KEYWORDS: Polymers, Absorbance, Photoresist materials, Etching, Palladium, Lithography, Transparency, Polymerization, Resistance, Hydrogen

Proceedings Article | 14 May 2004 Paper
Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.536264
KEYWORDS: Polymers, Hydrogen, Solids, Photoresist materials, FT-IR spectroscopy, Ultraviolet radiation, Optical lithography, Lithography, Photoresist developing, Molecules

Proceedings Article | 12 June 2003 Paper
Francis Houlihan, Raj Sakamuri, Andrew Romano, Ralph Dammel, Will Conley, Georgia Rich, Daniel Miller, Larry Rhodes, Joseph McDaniels, Chun Chang
Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.485196
KEYWORDS: Diffusion, Temperature metrology, Rutherfordium, Binary data, Annealing, Lithography, Chemically amplified resists, Image quality, Plasma etching, Resistance

Proceedings Article | 12 June 2003 Paper
Hiroshi Ito, William Hinsberg, Larry Rhodes, Chun Chang
Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.485135
KEYWORDS: Polymers, Hydrogen, Resistance, Reflectivity, Lithography, FT-IR spectroscopy, Absorption, Spectroscopy, Chlorine, Roads

Proceedings Article | 12 June 2003 Paper
Trevor Hoskins, Won Jae Chung, Peter Ludovice, Clifford Henderson, Larry Seger, Larry Rhodes, Robert Shick
Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.485145
KEYWORDS: Polymers, Hydrogen, Polymer thin films, FT-IR spectroscopy, Solids, Lithography, Photoresist materials, Palladium, X-ray diffraction, Molecules

Showing 5 of 12 publications
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