Dr. Larry D. Seger Profile

Dr. Larry D. Seger

at Promerus LLC

SPIE Involvement:

Author

Publications (5)

Proceedings Article | 4 May 2005 Paper

Development of optically transparent cyclic olefin photoresist binder resins

Larry Rhodes, Chun Chang, Cheryl Burns, Dennis Barnes, Brian Bennett, Larry Seger, Xiaoming Wu, Andy Sobek, Mike Mishak, Craig Peterson, Leah Langsdorf, Hideo Hada, Hiroaki Shimizu, Kazuhito Sasaki

Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.600051

KEYWORDS: Polymers, Absorbance, Photoresist materials, Etching, Palladium, Lithography, Transparency, Polymerization, Resistance, Hydrogen

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Proceedings Article | 14 May 2004 Paper

Effect of photoacid generator additives on the dissolution behavior of bis-trifluoromethyl carbinol substituted polynorbornene

Trevor Hoskins, Cody Berger, Peter Ludovice, Clifford Henderson, Larry Seger, Chun Chang, Larry Rhodes

Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.536264

KEYWORDS: Polymers, Hydrogen, Solids, Photoresist materials, FT-IR spectroscopy, Ultraviolet radiation, Optical lithography, Lithography, Photoresist developing, Molecules

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Proceedings Article | 12 June 2003 Paper

Dissolution behavior of bis-trifluoromethyl-carbinol-substituted polynorbornenes

Trevor Hoskins, Won Jae Chung, Peter Ludovice, Clifford Henderson, Larry Seger, Larry Rhodes, Robert Shick

Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.485145

KEYWORDS: Polymers, Hydrogen, Polymer thin films, FT-IR spectroscopy, Solids, Lithography, Photoresist materials, Palladium, X-ray diffraction, Molecules

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Proceedings Article | 12 June 2003 Paper

Evaluation of fluorinated dissolution inhibitors for 157-nm lithography

Alyssandrea Hamad, Francis Houlihan, Larry Seger, Chun Chang, Christopher Ober

Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.485099

KEYWORDS: Etching, Polymers, Hydrogen, Photoresist materials, Distributed interactive simulations, Polymethylmethacrylate, FT-IR spectroscopy, Neodymium, Lithography, Sodium

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Proceedings Article | 18 December 1996 Paper

Probing the microwave conductivity of low-dimensional organic conductors and superconductors in high-magnetic fields

Stephen Hill, Pavi Sandhu, C. Buhler, Shinya Uji, James Brooks, Larry Seger, M. Boonman, A. Wittlin, J. A. Perenboom, Philippe Goy, R. Kato, H. Sawa, S. Aonuma

Proceedings Volume 2842, (1996) https://doi.org/10.1117/12.262737

KEYWORDS: Magnetism, Chromium, Crystals, Waveguides, Microwave radiation, Electrodynamics, Superconductors, Fourier transforms, Molecules, Diodes

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