Larry S. Zurbrick
Solutions Marketing Manager at Keysight Technologies Inc
SPIE Involvement:
Conference Program Committee | Conference Chair | Symposium Chair | Author
Publications (33)

SPIE Conference Volume | 23 September 2009

SPIE Conference Volume | 17 October 2008

Proceedings Article | 6 December 2004
Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Lithography, Reticles, Defect detection, Sensors, Etching, Quartz, Manufacturing, Inspection, Photomasks, Resolution enhancement technologies

Proceedings Article | 20 August 2004
Proc. SPIE. 5446, Photomask and Next-Generation Lithography Mask Technology XI
KEYWORDS: Reticles, Etching, Quartz, Manufacturing, Inspection, Attenuators, Photomasks, Neodymium, Vestigial sideband modulation, Resolution enhancement technologies

Proceedings Article | 20 August 2004
Proc. SPIE. 5446, Photomask and Next-Generation Lithography Mask Technology XI
KEYWORDS: Lithography, Reticles, Defect detection, Deep ultraviolet, Sensors, Databases, Quartz, Image processing, Inspection, Image transmission

Showing 5 of 33 publications
Conference Committee Involvement (6)
Photomask Technology
20 September 2020 | Monterey, California, United States
Photomask Technology
16 September 2019 | Monterey, California, United States
Photomask Technology
19 September 2011 | Monterey, California, United States
Photomask Technology
15 September 2009 | Monterey, California, United States
SPIE Photomask Technology
14 September 2009 | Monterey, United States
Showing 5 of 6 Conference Committees
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