Dr. Lars Erdmann
Researcher at Carl Zeiss Jena GmbH
SPIE Involvement:
Author
Publications (14)

PROCEEDINGS ARTICLE | September 25, 2017
Proc. SPIE. 10562, International Conference on Space Optics — ICSO 2016
KEYWORDS: Optical design, Prisms, Holography, Polarization, Reflection, Spectrometers, Manufacturing, Wavefronts, Wavefront aberrations, Diffraction gratings

SPIE Journal Paper | October 1, 2005
JM3 Vol. 4 Issue 04
KEYWORDS: Lithography, Digital micromirror devices, Photomasks, Microlens array, Photoresist materials, Objectives, Computer generated holography, Micromirrors, Lenses, Optical components

PROCEEDINGS ARTICLE | December 29, 2003
Proc. SPIE. 5347, Micromachining Technology for Micro-Optics and Nano-Optics II
KEYWORDS: Microelectromechanical systems, Optical components, Lithography, Photoresist materials, Computer generated holography, Objectives, Micromirrors, Photomasks, Digital micromirror devices, Rapid manufacturing

PROCEEDINGS ARTICLE | June 2, 2003
Proc. SPIE. 5038, Metrology, Inspection, and Process Control for Microlithography XVII
KEYWORDS: Temporal coherence, Microscopes, Optical lithography, Microlens array, Speckle, Inspection, Diffusers, Microlens, Excimer lasers, Pulsed laser operation

PROCEEDINGS ARTICLE | August 16, 2002
Proc. SPIE. 4775, Modeling and Characterization of Light Sources
KEYWORDS: Temporal coherence, Diffraction, Mirrors, Microlens array, Deep ultraviolet, Speckle, Microlens, Spatial coherence, Excimer lasers, Diffraction gratings

PROCEEDINGS ARTICLE | November 9, 2001
Proc. SPIE. 4440, Lithographic and Micromachining Techniques for Optical Component Fabrication
KEYWORDS: Diffraction, Microlens array, Digital photography, Lenses, Cameras, Photography, Image resolution, Microlens, Modulation transfer functions, 3D image processing

Showing 5 of 14 publications
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