Prof. Lars Montelius
Dean of Physics Dept at Lunds Univ
SPIE Involvement:
Conference Program Committee | Author
Publications (5)

Proceedings Article | 16 June 2003
Proc. SPIE. 5037, Emerging Lithographic Technologies VII
KEYWORDS: Polymethylmethacrylate, Etching, Polymers, Glasses, Resistance, Polymerization, Epoxies, Plasma etching, Nanoimprint lithography, Temperature metrology

Proceedings Article | 11 June 2003
Proc. SPIE. 5023, 10th International Symposium on Nanostructures: Physics and Technology
KEYWORDS: Nanostructures, Electrodes, Metals, Molecules, Resistance, Physics, Scanning electron microscopy, Transistors, Electron transport, Molecular electronics

Proceedings Article | 21 July 2000
Proc. SPIE. 3997, Emerging Lithographic Technologies IV
KEYWORDS: Lithography, Nanostructures, Polymethylmethacrylate, Sensors, Etching, Metals, Nanoimprint lithography, Reactive ion etching, Semiconducting wafers, Nanolithography

Proceedings Article | 2 September 1992
Proc. SPIE. 1676, Advanced Semiconductor Epitaxial Growth Processes and Lateral and Vertical Fabrication
KEYWORDS: Electron beam lithography, Quantum wells, Polymethylmethacrylate, Etching, Dry etching, Luminescence, Gallium arsenide, Scanning electron microscopy, Wet etching, Excitons

Proceedings Article | 1 July 1992
Proc. SPIE. 1678, Spectroscopic Characterization Techniques for Semiconductor Technology IV
KEYWORDS: Semiconductors, Quantum wells, Metals, Luminescence, Photons, Electrons, Helium, P-type semiconductors, N-type semiconductors, Scanning tunneling microscopy

Conference Committee Involvement (1)
2 May 2007 | Maspalomas, Gran Canaria, Spain
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