Laura Evangelio Araujo
PhD Student at IMB-CNM (CSIC)
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | May 25, 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Lithography, Nanostructures, Etching, Polymers, Interfaces, Oxygen, Directed self assembly, Plasma etching, Picosecond phenomena, Organic chemistry

SPIE Journal Paper | September 21, 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Polymers, Electron beam lithography, Atomic force microscopy, Silicon, Photoresist processing, Deep ultraviolet, Annealing, Polymethylmethacrylate, Electrons, Directed self assembly

SPIE Journal Paper | September 11, 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Polymethylmethacrylate, Polymers, Atomic force microscopy, Polymer thin films, Thin films, Dewetting, Silicon, Plasma, Manganese, Spatial resolution

PROCEEDINGS ARTICLE | March 27, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Thin films, Polymethylmethacrylate, Polymers, Dewetting, Silicon, Atomic force microscopy, Erbium, Picosecond phenomena, Manganese, Polymer thin films

PROCEEDINGS ARTICLE | March 27, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Electron beam lithography, Polymethylmethacrylate, Deep ultraviolet, Polymers, Electrons, Silicon, Atomic force microscopy, Directed self assembly, Photoresist processing, Molecular self-assembly

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