Dr. Laurens Kwakman
at FEI Co
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 25 June 2020 Presentation + Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Wafer-level optics, Metrology, Scanning electron microscopy, Transmission electron microscopy, Photomasks, Dysprosium, Line edge roughness, Semiconducting wafers, Overlay metrology, Scanning transmission electron microscopy

Proceedings Article | 26 March 2019 Presentation + Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Metrology, Etching, Dielectrics, Transmission electron microscopy, Line width roughness, Transistors, Critical dimension metrology, Line edge roughness, Semiconducting wafers, Scanning transmission electron microscopy

Proceedings Article | 26 March 2019 Presentation + Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Signal to noise ratio, Metrology, Silicon, 3D metrology, Scanning transmission electron microscopy, Nanowires

Proceedings Article | 2 August 2018 Presentation + Paper
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Metrology, Etching, Atomic force microscopy, Transmission electron microscopy, Signal processing, Photomasks, Extreme ultraviolet, Semiconducting wafers

Proceedings Article | 3 October 2016 Presentation + Paper
Proc. SPIE. 9967, Developments in X-Ray Tomography X
KEYWORDS: Signal to noise ratio, Electron beams, Sensors, X-rays, Scanning electron microscopy, Tomography, Spatial resolution, X-ray imaging, X-ray detectors, Nanowires

Showing 5 of 7 publications
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