Prof. Laurent A. Francis
Professor/Microsystems Chair at Univ Catholique de Louvain
SPIE Involvement:
Conference Program Committee | Author
Publications (5)

PROCEEDINGS ARTICLE | June 4, 2014
Proc. SPIE. 9113, Sensors for Extreme Harsh Environments
KEYWORDS: Microelectromechanical systems, Oxides, Gas sensors, Annealing, Tungsten, Silicon, Diodes, Integrated circuits, Gamma radiation, Environmental sensing

PROCEEDINGS ARTICLE | March 9, 2013
Proc. SPIE. 8614, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII
KEYWORDS: Microelectromechanical systems, Ferroelectric materials, Capacitors, Silica, Sensors, Dielectrics, Silicon, Capacitance, Radiation effects, Magnetometers

PROCEEDINGS ARTICLE | May 5, 2011
Proc. SPIE. 8066, Smart Sensors, Actuators, and MEMS V
KEYWORDS: Gas sensors, Sensors, Etching, Electrodes, Resistance, Humidity, Ionization, Isotropic etching, Plasma, Nanowires

PROCEEDINGS ARTICLE | May 3, 2011
Proc. SPIE. 8068, Bioelectronics, Biomedical, and Bioinspired Systems V; and Nanotechnology V
KEYWORDS: Microelectromechanical systems, Gold, Electrodes, Nickel, Ions, Silicon, Scanning electron microscopy, Microfabrication, Semiconducting wafers, Nanowires

PROCEEDINGS ARTICLE | August 16, 2004
Proc. SPIE. 5455, MEMS, MOEMS, and Micromachining
KEYWORDS: Packaging, Sensors, Signal attenuation, Quartz, Glasses, Biosensors, Transducers, Epoxies, Acoustics, Liquids

Conference Committee Involvement (2)
Bioinspiration, Biomimetics, and Bioreplication IX
3 March 2019 | Denver, Colorado, United States
Sensors for Extreme Harsh Environments II
22 April 2015 | Baltimore, Maryland, United States
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